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3Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer DepositionWeitere Verfasser: “...Ritala, Mikko...”
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7In situ reaction mechanism studies on the atomic layer deposition of Al2O3 from (CH3)2AlCl and waterWeitere Verfasser: “...Ritala, Mikko...”
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8Weitere Verfasser: “...Ritala, Mikko...”
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