Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry

par Mattinen, Miika
Publié dans: Chemistry of materials : a publication of the American Chemical Society (2022)

Atomic Layer Deposition of Rhenium Disulfide

par Hämäläinen, Jani
Publié dans: Advanced materials (Deerfield Beach, Fla.) (2018)

Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition

par Mattinen, Miika
Publié dans: Langmuir : the ACS journal of surfaces and colloids (2016)