Reaction mechanism studies on atomic layer deposition of Nb2O5 from Nb(OEt)5 and water
The reaction mechanism in the atomic layer deposition of Nb(2)O(5) from Nb(OEt)(5) and deuterated water was studied in situ with a quadrupole mass spectrometer (QMS) and a quartz crystal microbalance (QCM). The responses of these in situ measurement techniques to the characteristics of the ALD proce...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1999. - 26(2010), 2 vom: 19. Jan., Seite 848-53 |
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| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2010
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article |
| Online verfügbar |
Volltext |