Lowest limit for detection of impurity concentration in semiconductors by fluorescence XAFS : resonant Raman scattering and angle dependence

The lowest limit for detection (LLD) of the impurity concentration doped in semiconductors in the case of fluorescence XAFS measurements has been investigated as a function of the matrix of the impurity and the geometry of the measurement. When the impurity concentration is very low and other backgr...

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Bibliographische Detailangaben
Veröffentlicht in:Journal of synchrotron radiation. - 1998. - 12(2005), Pt 4 vom: 21. Juli, Seite 494-8
1. Verfasser: Takeda, Y (VerfasserIn)
Weitere Verfasser: Ofuchi, H, Kyouzu, H, Takahashi, R, Tabuchi, M
Format: Aufsatz
Sprache:English
Veröffentlicht: 2005
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Evaluation Study Journal Article Research Support, Non-U.S. Gov't Erbium 77B218D3YE