Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask

Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask

open access.

Bibliographische Detailangaben
Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 26(2019), Pt 5 vom: 01. Sept., Seite 1782-1789
1. Verfasser: Lin, Dakui (VerfasserIn)
Weitere Verfasser: Liu, Zhengkun, Dietrich, Kay, Sokolov, Andréy, Sertsu, Mewael Giday, Zhou, Hongjun, Huo, Tonglin, Kroker, Stefanie, Chen, Huoyao, Qiu, Keqiang, Xu, Xiangdong, Schäfers, Franz, Liu, Ying, Kley, Ernst Bernhard, Hong, Yilin
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2019
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article electron beam lithography fabrication near-field holography soft X-ray varied-line-spacing grating spectrometer
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520 |a A fabrication method comprising near-field holography (NFH) with an electron beam lithography (EBL)-written phase mask was developed to fabricate soft X-ray varied-line-spacing gratings (VLSGs). An EBL-written phase mask with an area of 52 mm × 30 mm and a central line density greater than 3000 lines mm-1 was used. The introduction of the EBL-written phase mask substantially simplified the NFH optics for pattern transfer. The characterization of the groove density distribution and diffraction efficiency of the fabricated VLSGs indicates that the EBL-NFH method is feasible and promising for achieving high-accuracy groove density distributions with corresponding image properties. Vertical stray light is suppressed in the soft X-ray spectral range 
650 4 |a Journal Article 
650 4 |a electron beam lithography 
650 4 |a fabrication 
650 4 |a near-field holography 
650 4 |a soft X-ray varied-line-spacing grating 
650 4 |a spectrometer 
700 1 |a Liu, Zhengkun  |e verfasserin  |4 aut 
700 1 |a Dietrich, Kay  |e verfasserin  |4 aut 
700 1 |a Sokolov, Andréy  |e verfasserin  |4 aut 
700 1 |a Sertsu, Mewael Giday  |e verfasserin  |4 aut 
700 1 |a Zhou, Hongjun  |e verfasserin  |4 aut 
700 1 |a Huo, Tonglin  |e verfasserin  |4 aut 
700 1 |a Kroker, Stefanie  |e verfasserin  |4 aut 
700 1 |a Chen, Huoyao  |e verfasserin  |4 aut 
700 1 |a Qiu, Keqiang  |e verfasserin  |4 aut 
700 1 |a Xu, Xiangdong  |e verfasserin  |4 aut 
700 1 |a Schäfers, Franz  |e verfasserin  |4 aut 
700 1 |a Liu, Ying  |e verfasserin  |4 aut 
700 1 |a Kley, Ernst Bernhard  |e verfasserin  |4 aut 
700 1 |a Hong, Yilin  |e verfasserin  |4 aut 
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773 1 8 |g volume:26  |g year:2019  |g number:Pt 5  |g day:01  |g month:09  |g pages:1782-1789 
856 4 0 |u http://dx.doi.org/10.1107/S1600577519008245  |3 Volltext 
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