Dielectric Engineering of a Boron Nitride/Hafnium Oxide Heterostructure for High-Performance 2D Field Effect Transistors

Dielectric Engineering of a Boron Nitride/Hafnium Oxide Heterostructure for High-Performance 2D Field Effect Transistors

© 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 28(2016), 10 vom: 09. März, Seite 2062-9
1. Verfasser: Zou, Xuming (VerfasserIn)
Weitere Verfasser: Huang, Chun-Wei, Wang, Lifeng, Yin, Long-Jing, Li, Wenqing, Wang, Jingli, Wu, Bin, Liu, Yunqi, Yao, Qian, Jiang, Changzhong, Wu, Wen-Wei, He, Lin, Chen, Shanshan, Ho, Johnny C, Liao, Lei
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2016
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article 2D materials boron nitride dielectric engineering heterostructures transistors
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520 |a A unique design of a hexagonal boron nitride (h-BN)/HfO2 dielectric heterostructure stack is demonstrated, with few-layer h-BN to alleviate the surface optical phonon scattering, followed by high-κ HfO2 deposition to suppress Coulombic impurity scattering so that high-performance top-gated two-dimensional semiconductor transistors are achieved. Furthermore, this dielectric stack can also be extended to GaN-based transistors to enhance their performance 
650 4 |a Journal Article 
650 4 |a 2D materials 
650 4 |a boron nitride 
650 4 |a dielectric engineering 
650 4 |a heterostructures 
650 4 |a transistors 
700 1 |a Huang, Chun-Wei  |e verfasserin  |4 aut 
700 1 |a Wang, Lifeng  |e verfasserin  |4 aut 
700 1 |a Yin, Long-Jing  |e verfasserin  |4 aut 
700 1 |a Li, Wenqing  |e verfasserin  |4 aut 
700 1 |a Wang, Jingli  |e verfasserin  |4 aut 
700 1 |a Wu, Bin  |e verfasserin  |4 aut 
700 1 |a Liu, Yunqi  |e verfasserin  |4 aut 
700 1 |a Yao, Qian  |e verfasserin  |4 aut 
700 1 |a Jiang, Changzhong  |e verfasserin  |4 aut 
700 1 |a Wu, Wen-Wei  |e verfasserin  |4 aut 
700 1 |a He, Lin  |e verfasserin  |4 aut 
700 1 |a Chen, Shanshan  |e verfasserin  |4 aut 
700 1 |a Ho, Johnny C  |e verfasserin  |4 aut 
700 1 |a Liao, Lei  |e verfasserin  |4 aut 
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