Design of experiment for optimization of plasma-polymerized octafluorocyclobutane coating on very high aspect ratio silicon molds
As-fabricated deep reactive ion etched (DRIE) silicon mold with very high aspect ratio (>10) feature patterns is unsuitable for poly(dimethylsiloxane) (PDMS) replication because of the strong interaction between the Si surface and the replica and the corrugated mold sidewalls. The silicon mold ca...
Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 22(2006), 24 vom: 21. Nov., Seite 10196-203 |
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Auteur principal: | |
Autres auteurs: | , , |
Format: | Article |
Langue: | English |
Publié: |
2006
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Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids |
Sujets: | Journal Article Research Support, Non-U.S. Gov't Biocompatible Materials Chlorofluorocarbons Chlorofluorocarbons, Methane Coated Materials, Biocompatible Dimethylpolysiloxanes Nylons poly(dimethylsiloxane)-polyamide copolymer Fluorine plus... |