Design of experiment for optimization of plasma-polymerized octafluorocyclobutane coating on very high aspect ratio silicon molds

As-fabricated deep reactive ion etched (DRIE) silicon mold with very high aspect ratio (>10) feature patterns is unsuitable for poly(dimethylsiloxane) (PDMS) replication because of the strong interaction between the Si surface and the replica and the corrugated mold sidewalls. The silicon mold ca...

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Publié dans:Langmuir : the ACS journal of surfaces and colloids. - 1985. - 22(2006), 24 vom: 21. Nov., Seite 10196-203
Auteur principal: Yeo, L P (Auteur)
Autres auteurs: Yan, Y H, Lam, Y C, Chan-Park, Mary B
Format: Article
Langue:English
Publié: 2006
Accès à la collection:Langmuir : the ACS journal of surfaces and colloids
Sujets:Journal Article Research Support, Non-U.S. Gov't Biocompatible Materials Chlorofluorocarbons Chlorofluorocarbons, Methane Coated Materials, Biocompatible Dimethylpolysiloxanes Nylons poly(dimethylsiloxane)-polyamide copolymer Fluorine plus... 284SYP0193 octafluorocyclobutane V9P1D0A21K Silicon Z4152N8IUI