|
|
|
|
| LEADER |
01000caa a22002652 4500 |
| 001 |
NLM153487976 |
| 003 |
DE-627 |
| 005 |
20250206051450.0 |
| 007 |
tu |
| 008 |
231223s2004 xx ||||| 00| ||eng c |
| 028 |
5 |
2 |
|a pubmed25n0512.xml
|
| 035 |
|
|
|a (DE-627)NLM153487976
|
| 035 |
|
|
|a (NLM)15690731
|
| 040 |
|
|
|a DE-627
|b ger
|c DE-627
|e rakwb
|
| 041 |
|
|
|a eng
|
| 100 |
1 |
|
|a Elmazria, Omar
|e verfasserin
|4 aut
|
| 245 |
1 |
0 |
|a Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter
|
| 264 |
|
1 |
|c 2004
|
| 336 |
|
|
|a Text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a ohne Hilfsmittel zu benutzen
|b n
|2 rdamedia
|
| 338 |
|
|
|a Band
|b nc
|2 rdacarrier
|
| 500 |
|
|
|a Date Completed 10.03.2005
|
| 500 |
|
|
|a Date Revised 17.09.2019
|
| 500 |
|
|
|a published: Print
|
| 500 |
|
|
|a Citation Status PubMed-not-MEDLINE
|
| 520 |
|
|
|a In this work, the effect of a diamond nucleation process on freestanding aluminium nitride (AlN)/diamond surface acoustic wave (SAW) device performances was studied. Before diamond deposition, silicon (Si) substrates have been mechanically nucleated, using an ultrasonic vibration table with submicron diamond slurry, and bias-enhanced nucleated (BEN). Freestanding diamond layers obtained on mechanically scratched Si substrates exhibit a surface roughness of R(MS) = 13 nm, whereas very low surface roughness (as low as R(MS) < or = 1 nm) can be achieved on a freestanding BEN diamond layer. Propagation losses have been measured as a function of the operating frequency for the two nucleation techniques. Dispersion curves of phase velocities and electromechanical coupling coefficient (K2) were determined experimentally and by calculation as a function of normalized thickness AlN film (kh(AlN) = 2pi h(AlN)/lambda). Experimental results show that the propagation losses strongly depend on the nucleation technique, and that these losses are weakly increased with frequency when the BEN technique is used
|
| 650 |
|
4 |
|a Journal Article
|
| 700 |
1 |
|
|a El Hakiki, Mohamed
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Mortet, Vincent
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Assouar, Badreddine M
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Nesládek, Milos
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Vanecek, Milan
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Bergonzo, Philippe
|e verfasserin
|4 aut
|
| 700 |
1 |
|
|a Alnot, Patrick
|e verfasserin
|4 aut
|
| 773 |
0 |
8 |
|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1999
|g 51(2004), 12 vom: 03. Dez., Seite 1704-9
|w (DE-627)NLM098181017
|x 0885-3010
|7 nnns
|
| 773 |
1 |
8 |
|g volume:51
|g year:2004
|g number:12
|g day:03
|g month:12
|g pages:1704-9
|
| 912 |
|
|
|a GBV_USEFLAG_A
|
| 912 |
|
|
|a SYSFLAG_A
|
| 912 |
|
|
|a GBV_NLM
|
| 912 |
|
|
|a GBV_ILN_22
|
| 912 |
|
|
|a GBV_ILN_24
|
| 912 |
|
|
|a GBV_ILN_350
|
| 951 |
|
|
|a AR
|
| 952 |
|
|
|d 51
|j 2004
|e 12
|b 03
|c 12
|h 1704-9
|