Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter

In this work, the effect of a diamond nucleation process on freestanding aluminium nitride (AlN)/diamond surface acoustic wave (SAW) device performances was studied. Before diamond deposition, silicon (Si) substrates have been mechanically nucleated, using an ultrasonic vibration table with submicro...

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Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 51(2004), 12 vom: 03. Dez., Seite 1704-9
1. Verfasser:	Elmazria, Omar (VerfasserIn)
Weitere Verfasser:	El Hakiki, Mohamed, Mortet, Vincent, Assouar, Badreddine M, Nesládek, Milos, Vanecek, Milan, Bergonzo, Philippe, Alnot, Patrick
Format:	Aufsatz
Sprache:	English
Veröffentlicht:	2004
Zugriff auf das übergeordnete Werk:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:	Journal Article