Wide vacuum pressure range monitoring by Pirani SAW sensor

von Nicolay, Pascal
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)

GHz frequency ZnO/Si SAW device

von Brizoual, Laurent Le
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2008)

Combination of e-beam lithography and of high velocity AIN/diamond-layered structure for SAW filters in X band

von Kirsch, Philippe
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2007)

Theoretical investigation of surface acoustic wave in the new, three-layered structure ZnO/AlN/diamond

von El Hakiki, Mohamed
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2007)

Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter

von Elmazria, Omar
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2004)

Sezawa mode SAW pressure sensors based on ZnO/Si structure

von Talbi, Abdelkrim
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2004)

High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond

von Elmazria, Omar
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2003)