Wide vacuum pressure range monitoring by Pirani SAW sensor
A new kind of surface acoustic wave (SAW) sensor has been developed to measure sub-atmospheric pressure below 100 mtorr with accuracy better than 0.1 mtorr. It provides an efficient measuring solution in the pressure range inaccessible in past by conventional diaphragm-based SAW sensors. Indeed, bec...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 3 vom: 01. März, Seite 684-9
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| 1. Verfasser: |
Nicolay, Pascal
(VerfasserIn) |
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| Weitere Verfasser: |
Elmazria, Omar,
Sarry, Frederic,
Bouvot, Laurent,
Kambara, Hisanori,
Singh, Kanwar J,
Alnot, Patrick |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2010
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't |
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