GHz frequency ZnO/Si SAW device
The demand for high-frequency low-loss filters generates intensive research on innovative wave guide solutions. In this work, a GHz SAW device based on a ZnO/Si structure was fabricated using classical UV photolithography. The thickness of the piezoelectric thin film was optimized and a specific int...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 55(2008), 2 vom: 01. Feb., Seite 442-50
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| 1. Verfasser: |
Brizoual, Laurent Le
(VerfasserIn) |
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| Weitere Verfasser: |
Sarry, Frederic,
Elmazria, Omar,
Alnot, Patrick,
Ballandras, Sylvain,
Pastureaud, Thomas |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2008
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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