Facile and Reconfigurable Opaque Droplet-based Photomask for Photolithography
Photolithography is a widely used technology in microfabrication, where photomasks are mostly indispensable. The fabrication of photomasks is generally costly, irreversible, and time-consuming, which limits the prompt delivery of photolithography especially in low-resource settings. Herein, we intro...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1999. - 40(2024), 37 vom: 17. Sept., Seite 19654-19664
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| 1. Verfasser: |
Zhang, Cheng
(VerfasserIn) |
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| Weitere Verfasser: |
Abdulla, Aynur,
Xu, Jiasu,
Jiang, Lai,
Ding, Xianting |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2024
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article |
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