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240905s2024 xx |||||o 00| ||eng c |
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|a 10.1021/acs.langmuir.4c02305
|2 doi
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|a eng
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|a Zhang, Cheng
|e verfasserin
|4 aut
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|a Facile and Reconfigurable Opaque Droplet-based Photomask for Photolithography
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|c 2024
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|a Text
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|a ƒaComputermedien
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|a Date Revised 17.09.2024
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a Photolithography is a widely used technology in microfabrication, where photomasks are mostly indispensable. The fabrication of photomasks is generally costly, irreversible, and time-consuming, which limits the prompt delivery of photolithography especially in low-resource settings. Herein, we introduce a facile technique for green and reversible photomask fabrication with opaque droplets, termed as "droplet-based photomask." Paraffin oil, Span 80, and water are the only components needed (total volume ∼1 mL). Specifically, with a microchip, water droplets were generated and collected in paraffin oil dissolving Span 80 (1-10 wt %) as surfactant. Monodispersed droplets were obtained with adjustable diameters ranging from 128.7 ± 0.6 to 212.0 ± 3.4 μm. Subsequently, Span 80 reverse micelles adhered to the droplet surface, forming an opaque membrane. The mechanism was proposed. The equilibrium time of membrane formation varied from 8 to 20 h depending on the surfactant concentration. The lifespan of droplet-based photomasks was up to 339-398 h (∼14-17 days). Furthermore, the membrane could be removed and regenerated, permitting the reconfigurability of droplet-based photomasks. Finally, a proof-of-concept demonstration was conducted using a droplet-based photomask in photolithography. Concave circular molds were obtained with various patterns. Compared with traditional photomask manufacturing pipeline, the fabrication of droplet-based photomasks profoundly reduces the chemical use, environmental burden, time, and cost
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|a Journal Article
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1 |
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|a Abdulla, Aynur
|e verfasserin
|4 aut
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1 |
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|a Xu, Jiasu
|e verfasserin
|4 aut
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|a Jiang, Lai
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Ding, Xianting
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Langmuir : the ACS journal of surfaces and colloids
|d 1999
|g 40(2024), 37 vom: 17. Sept., Seite 19654-19664
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|g volume:40
|g year:2024
|g number:37
|g day:17
|g month:09
|g pages:19654-19664
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|u http://dx.doi.org/10.1021/acs.langmuir.4c02305
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