Facile and Reconfigurable Opaque Droplet-based Photomask for Photolithography
Photolithography is a widely used technology in microfabrication, where photomasks are mostly indispensable. The fabrication of photomasks is generally costly, irreversible, and time-consuming, which limits the prompt delivery of photolithography especially in low-resource settings. Herein, we intro...
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1999. - 40(2024), 37 vom: 17. Sept., Seite 19654-19664 |
|---|---|
| 1. Verfasser: | |
| Weitere Verfasser: | , , , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2024
|
| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids |
| Schlagworte: | Journal Article |
| Zusammenfassung: | Photolithography is a widely used technology in microfabrication, where photomasks are mostly indispensable. The fabrication of photomasks is generally costly, irreversible, and time-consuming, which limits the prompt delivery of photolithography especially in low-resource settings. Herein, we introduce a facile technique for green and reversible photomask fabrication with opaque droplets, termed as "droplet-based photomask." Paraffin oil, Span 80, and water are the only components needed (total volume ∼1 mL). Specifically, with a microchip, water droplets were generated and collected in paraffin oil dissolving Span 80 (1-10 wt %) as surfactant. Monodispersed droplets were obtained with adjustable diameters ranging from 128.7 ± 0.6 to 212.0 ± 3.4 μm. Subsequently, Span 80 reverse micelles adhered to the droplet surface, forming an opaque membrane. The mechanism was proposed. The equilibrium time of membrane formation varied from 8 to 20 h depending on the surfactant concentration. The lifespan of droplet-based photomasks was up to 339-398 h (∼14-17 days). Furthermore, the membrane could be removed and regenerated, permitting the reconfigurability of droplet-based photomasks. Finally, a proof-of-concept demonstration was conducted using a droplet-based photomask in photolithography. Concave circular molds were obtained with various patterns. Compared with traditional photomask manufacturing pipeline, the fabrication of droplet-based photomasks profoundly reduces the chemical use, environmental burden, time, and cost |
|---|---|
| Beschreibung: | Date Revised 17.09.2024 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
| ISSN: | 1520-5827 |
| DOI: | 10.1021/acs.langmuir.4c02305 |