Exploring Low-Loss Surface Acoustic Wave Devices on Heterogeneous Substrates
This article presents shear horizontal surface acoustic wave (SH-SAW) devices with excellent temperature stability and low loss on ultrathin Y42-cut lithium tantalate film on sapphire substrate (LiTaO3-on-sapphire, LTOS). The demonstrated resonators exhibit scalable resonances from 1.76 to 3.17 GHz,...
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| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 69(2022), 8 vom: 02. Aug., Seite 2579-2584
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| 1. Verfasser: |
Wu, Jinbo
(VerfasserIn) |
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| Weitere Verfasser: |
Zhang, Shibin,
Zhang, Liping,
Zhou, Hongyan,
Zheng, Pengcheng,
Yao, Hulin,
Li, Zhongxu,
Huang, Kai,
Wu, Tao,
Ou, Xin |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2022
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article
Research Support, Non-U.S. Gov't
Aluminum Oxide
LMI26O6933 |
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