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20241013231823.0 |
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231225s2021 xx |||||o 00| ||eng c |
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|a 10.1002/adma.202102232
|2 doi
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|a pubmed24n1566.xml
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|a (DE-627)NLM330366270
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|a (NLM)34494318
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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| 100 |
1 |
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|a Leitis, Aleksandrs
|e verfasserin
|4 aut
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| 245 |
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|a Wafer-Scale Functional Metasurfaces for Mid-Infrared Photonics and Biosensing
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|c 2021
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
|b cr
|2 rdacarrier
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|a Date Completed 24.07.2024
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|a Date Revised 13.10.2024
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|a published: Print-Electronic
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|a Citation Status MEDLINE
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|a © 2021 The Authors. Advanced Materials published by Wiley-VCH GmbH.
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|a Metasurfaces have emerged as a breakthrough platform for manipulating light at the nanoscale and enabling on-demand optical functionalities for next-generation biosensing, imaging, and light-generating photonic devices. However, translating this technology to practical applications requires low-cost and high-throughput fabrication methods. Due to the limited choice of materials with suitable optical properties, it is particularly challenging to produce metasurfaces for the technologically relevant mid-infrared spectral range. These constraints are overcome by realizing functional metasurfaces on almost completely transparent free-standing metal-oxide membranes. A versatile nanofabrication process is developed and implemented for highly efficient dielectric and plasmonic mid-infrared metasurfaces with wafer-scale and complementary metal-oxide-semiconductor (CMOS)-compatible manufacturing techniques. The advantages of this method are revealed by demonstrating highly uniform and functional metasurfaces, including high-Q structures enabling fine spectral selectivity, large-area metalenses with diffraction-limited focusing capabilities, and birefringent metasurfaces providing polarization control at record-high conversion efficiencies. Aluminum plasmonic devices and their integration into microfluidics for real-time and label-free mid-infrared biosensing of proteins and lipid vesicles are further demonstrated. The versatility of this approach and its compatibility with mass-production processes bring infrared metasurfaces markedly closer to commercial applications, such as thermal imaging, spectroscopy, and biosensing
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|a Journal Article
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|a CMOS compatibility
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|a biosensing
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|a deep ultraviolet lithography
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|a free-standing membranes
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|a high-throughput fabrication
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|a metasurfaces
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|a wavefront and polarization control
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|a Aluminum
|2 NLM
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|a CPD4NFA903
|2 NLM
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| 700 |
1 |
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|a Tseng, Ming Lun
|e verfasserin
|4 aut
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| 700 |
1 |
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|a John-Herpin, Aurelian
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Kivshar, Yuri S
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Altug, Hatice
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Advanced materials (Deerfield Beach, Fla.)
|d 1998
|g 33(2021), 43 vom: 30. Okt., Seite e2102232
|w (DE-627)NLM098206397
|x 1521-4095
|7 nnns
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| 773 |
1 |
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|g volume:33
|g year:2021
|g number:43
|g day:30
|g month:10
|g pages:e2102232
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|u http://dx.doi.org/10.1002/adma.202102232
|3 Volltext
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| 912 |
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|a GBV_USEFLAG_A
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| 912 |
|
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|a SYSFLAG_A
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| 912 |
|
|
|a GBV_NLM
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| 912 |
|
|
|a GBV_ILN_350
|
| 951 |
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|a AR
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| 952 |
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|d 33
|j 2021
|e 43
|b 30
|c 10
|h e2102232
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