Highly Scalable and Robust Mesa-Island-Structure Metal-Oxide Thin-Film Transistors and Integrated Circuits Enabled by Stress-Diffusive Manipulation

© 2020 Wiley-VCH GmbH.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 32(2020), 40 vom: 21. Okt., Seite e2003276
1. Verfasser: Kim, Kyung-Tae (VerfasserIn)
Weitere Verfasser: Moon, Sanghee, Kim, Minho, Jo, Jeong-Wan, Park, Chan-Yong, Kang, Seung-Han, Kim, Yong-Hoon, Park, Sung Kyu
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2020
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article amorphous oxide thin-film transistors mesa-island structure scalability stress-diffusion ultraflexibility
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520 |a The increasing interest in flexible and wearable electronics has demanded a dramatic improvement of mechanical robustness in electronic devices along with high-resolution implemented architectures. In this study, a site-specific stress-diffusive manipulation is demonstrated to fulfill highly robust and ultraflexible amorphous indium-gallium-zinc oxide (a-IGZO) thin-film transistors (TFTs) and integrated circuits. The photochemically activated combustion sol-gel a-IGZO TFTs on a mesa-structured polyimide show an average saturation mobility of 6.06 cm2 V-1 s-1 and a threshold voltage of -0.99 V with less than 9% variation, followed by 10 000 bending cycles with a radius of 125 μm. More importantly, the site-specific monolithic formation of mesa pillar-structured devices can provide fully integrated logic circuits such as seven-stage ring-oscillators, meeting the industrially needed device density and scalability. To exploit the underlying stress-diffusive mechanism, a physical model is provided by using a variety of chemical, structural, and electrical characterizations along with multidomain finite-element analysis simulation. The physical models reveal that a highly scalable and robust device can be achieved via the site-specific mesa architecture, by enabling generation of multineutral layers and fine-tuning the accumulated stresses on specific element of devices with their diffusion out into the boundary of the mesa regions 
650 4 |a Journal Article 
650 4 |a amorphous oxide thin-film transistors 
650 4 |a mesa-island structure 
650 4 |a scalability 
650 4 |a stress-diffusion 
650 4 |a ultraflexibility 
700 1 |a Moon, Sanghee  |e verfasserin  |4 aut 
700 1 |a Kim, Minho  |e verfasserin  |4 aut 
700 1 |a Jo, Jeong-Wan  |e verfasserin  |4 aut 
700 1 |a Park, Chan-Yong  |e verfasserin  |4 aut 
700 1 |a Kang, Seung-Han  |e verfasserin  |4 aut 
700 1 |a Kim, Yong-Hoon  |e verfasserin  |4 aut 
700 1 |a Park, Sung Kyu  |e verfasserin  |4 aut 
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773 1 8 |g volume:32  |g year:2020  |g number:40  |g day:21  |g month:10  |g pages:e2003276 
856 4 0 |u http://dx.doi.org/10.1002/adma.202003276  |3 Volltext 
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