Local atomic structure analysis of GaN surfaces via X-ray absorption spectroscopy by detecting Auger electrons with low energies

GaN is a promising material for power semiconductor devices used in next-generation vehicles. Its electrical properties such as carrier mobility and threshold voltage are affected by the interface between the oxide and the semiconductor, and identifying the interface states is important to improve t...

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Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 26(2019), Pt 6 vom: 01. Nov., Seite 1951-1955
1. Verfasser: Isomura, Noritake (VerfasserIn)
Weitere Verfasser: Kikuta, Daigo, Takahashi, Naoko, Kosaka, Satoru, Kataoka, Keita
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2019
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article Auger electron yields K-shell absorption extended X-ray absorption fine structure gallium nitride surface sensitivity