Distinguishing nitrogen-containing sites in SiO2/4H-SiC(0001) after nitric oxide annealing by X-ray absorption spectroscopy

The atomic structure of nitrogen at the SiO2/4H-SiC(0001) interface has been investigated using X-ray absorption spectroscopy (XAS) in two nitric oxide annealed samples, one of which was oxidized in dry O2 (NO-POA) prior to the experiment. The peak shapes and energies of the observed and simulated s...

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Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 26(2019), Pt 2 vom: 01. März, Seite 462-466
1. Verfasser: Isomura, Noritake (VerfasserIn)
Weitere Verfasser: Kutsuki, Katsuhiro, Kataoka, Keita, Watanabe, Yukihiko, Kimoto, Yasuji
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2019
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article SiC–MOS X-ray absorption fine structure X-ray absorption spectroscopy XAFS XAS interface structure
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520 |a The atomic structure of nitrogen at the SiO2/4H-SiC(0001) interface has been investigated using X-ray absorption spectroscopy (XAS) in two nitric oxide annealed samples, one of which was oxidized in dry O2 (NO-POA) prior to the experiment. The peak shapes and energies of the observed and simulated spectra are in agreement and indicate that the N-containing sites could be the substitutional C site at the interface for the NO-annealed sample and the interstitial site in the interior of SiC for the NO-POA-annealed sample. XAS analysis distinguished between the N-containing sites at the SiO2/SiC interface 
650 4 |a Journal Article 
650 4 |a SiC–MOS 
650 4 |a X-ray absorption fine structure 
650 4 |a X-ray absorption spectroscopy 
650 4 |a XAFS 
650 4 |a XAS 
650 4 |a interface structure 
700 1 |a Kutsuki, Katsuhiro  |e verfasserin  |4 aut 
700 1 |a Kataoka, Keita  |e verfasserin  |4 aut 
700 1 |a Watanabe, Yukihiko  |e verfasserin  |4 aut 
700 1 |a Kimoto, Yasuji  |e verfasserin  |4 aut 
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