Direct-Write Laser Greyscale Lithography for Multi-Layer Lead Zirconate Titanate Thin Films
Direct-write laser greyscale lithography has been used to facilitate a single step patterning technique for multi-layer lead zirconate titanate (PZT) thin films. A 2.55 μm thick photoresist was patterned with a direct-write laser. The intensity of the laser was varied to create both tiered and slope...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - (2018) vom: 09. März
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| 1. Verfasser: |
Benoit, Robert R
(VerfasserIn) |
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| Weitere Verfasser: |
Jordan, Delaney M,
Smith, Gabriel L,
Polcawich, Ronald G,
Bedair, Sarah S,
Potrepka, Daniel M |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2018
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Schlagworte: | Journal Article |
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