A General Analytical Formulation for the Motional Parameters of Piezoelectric MEMS Resonators

von Puder, Jonathan M
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2018)

Direct-Write Laser Greyscale Lithography for Multi-Layer Lead Zirconate Titanate Thin Films

von Benoit, Robert R
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2018)

Rapid Harmonic Analysis of Piezoelectric MEMS Resonators

von Puder, Jonathan M
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2018)

Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films

von Benoit, Robert R
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2018)

Total Ionizing Dose Effects on Piezoelectric Thin-Film Cantilevers With Oxide Electrodes

von Rudy, Ryan Q
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2017)

Electrode-shaping for the excitation and detection of permitted arbitrary modes in arbitrary geometries in piezoelectric resonators

von Pulskamp, Jeffrey S
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2012)

PZT transduction of high-overtone contour-mode resonators

von Chandrahalim, Hengky
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)