Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films
Direct-write laser grayscale lithography has been used to facilitate a single-step patterning technique for multilayer lead zirconate titanate (PZT) thin films. A 2.55- -thick photoresist was patterned with a direct-write laser. The intensity of the laser was varied to create both tiered and sloped...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 65(2018), 5 vom: 07. Mai, Seite 889-894
|
|---|
| 1. Verfasser: |
Benoit, Robert R
(VerfasserIn) |
|---|
| Weitere Verfasser: |
Jordan, Delaney M,
Smith, Gabriel L,
Polcawich, Ronald G,
Bedair, Sarah S,
Potrepka, Daniel M |
|---|
| Format: | Online-Aufsatz
|
|---|
| Sprache: | English |
|---|
| Veröffentlicht: |
2018
|
|---|
| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|
|---|
| Schlagworte: | Journal Article
Research Support, U.S. Gov't, Non-P.H.S. |
|---|