Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films

von Benoit, Robert R
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2018)

Direct-Write Laser Greyscale Lithography for Multi-Layer Lead Zirconate Titanate Thin Films

von Benoit, Robert R
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2018)