A General Analytical Formulation for the Motional Parameters of Piezoelectric MEMS Resonators
This paper reports on a general analytical expression for the motional resistance ( ) of an arbitrary mode in a piezoelectric microelectromechanical system resonator with parallel plate electrode geometry. After applying simplifying assumptions and using analytical modes shapes, expressions for the...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 65(2018), 3 vom: 01. März, Seite 476-488 |
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| Weitere Verfasser: | , , , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2018
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |
| Zusammenfassung: | This paper reports on a general analytical expression for the motional resistance ( ) of an arbitrary mode in a piezoelectric microelectromechanical system resonator with parallel plate electrode geometry. After applying simplifying assumptions and using analytical modes shapes, expressions for the of modes with out-of-plane flexure as the primary displacement are presented. These modes include free-free transverse beam flexure (TBF), unclamped disk flexure resonators (DFRs), and antisymmetric Lamb modes. For verification, is extracted from resonators fabricated in a lead zirconate titanate on silicon process. Predicted of TBF and DFR modes is validated using on-wafer extracted constants, analytical modal properties, and independently measured material properties |
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| Beschreibung: | Date Completed 14.02.2019 Date Revised 15.02.2019 published: Print Citation Status PubMed-not-MEDLINE |
| ISSN: | 1525-8955 |
| DOI: | 10.1109/TUFFC.2018.2793099 |