Indium-Free Fully Transparent Electronics Deposited Entirely by Atomic Layer Deposition
© 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Veröffentlicht in: | Advanced materials (Deerfield Beach, Fla.). - 1998. - 28(2016), 35 vom: 04. Sept., Seite 7736-44 |
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1. Verfasser: | |
Weitere Verfasser: | , |
Format: | Online-Aufsatz |
Sprache: | English |
Veröffentlicht: |
2016
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Zugriff auf das übergeordnete Werk: | Advanced materials (Deerfield Beach, Fla.) |
Schlagworte: | Journal Article atomic layer deposition fully transparent thin-film transistors zinc oxide |
Zusammenfassung: | © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Indium-free, fully transparent thin-film transistors are fabricated entirely by the atomic layer deposition technique on rigid and flexible substrates at a low temperature of 160 °C. The transistors show high saturation mobility, large switching ratio, and small subthreshold swing value. The inverters and ring oscillators show large gain value and small propagation delay time, indicating the potential of this process in transparent electronic devices |
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Beschreibung: | Date Completed 17.07.2018 Date Revised 30.09.2020 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
ISSN: | 1521-4095 |
DOI: | 10.1002/adma.201600503 |