Study of the microstructure information of GaAs epilayers grown on silicon substrate using synchrotron radiation

Williamson-Hall (WH) analysis is a well established method for studying the microstructural properties of epilayers grown on foreign substrates. However, the method becomes inapplicable in specific cases where the structure factor considerations and the presence of anti-phase domains forbid the data...

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Bibliographische Detailangaben
Veröffentlicht in:Journal of synchrotron radiation. - 1994. - 23(2016), 1 vom: 25. Jan., Seite 238-43
1. Verfasser: Kumar, Ravi (VerfasserIn)
Weitere Verfasser: Dixit, V K, Sinha, A K, Ganguli, Tapas, Mukherjee, C, Oak, S M, Sharma, T K
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2016
Zugriff auf das übergeordnete Werk:Journal of synchrotron radiation
Schlagworte:Journal Article GaAs epilayers HRXRD Williamson–Hall analysis coherence length tilt twist