Full-field X-ray reflection microscopy of epitaxial thin-films
Novel X-ray imaging of structural domains in a ferroelectric epitaxial thin film using diffraction contrast is presented. The full-field hard X-ray microscope uses the surface scattering signal, in a reflectivity or diffraction experiment, to spatially resolve the local structure with 70 nm lateral...
| Veröffentlicht in: | Journal of synchrotron radiation. - 1994. - 21(2014), Pt 6 vom: 01. Nov., Seite 1252-61 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , , |
| Format: | Online-Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2014
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| Zugriff auf das übergeordnete Werk: | Journal of synchrotron radiation |
| Schlagworte: | Journal Article Research Support, U.S. Gov't, Non-P.H.S. X-ray microscopy X-ray surface diffraction interfaces and thin films materials science |
| Zusammenfassung: | Novel X-ray imaging of structural domains in a ferroelectric epitaxial thin film using diffraction contrast is presented. The full-field hard X-ray microscope uses the surface scattering signal, in a reflectivity or diffraction experiment, to spatially resolve the local structure with 70 nm lateral spatial resolution and sub-nanometer height sensitivity. Sub-second X-ray exposures can be used to acquire a 14 µm × 14 µm image with an effective pixel size of 20 nm on the sample. The optical configuration and various engineering considerations that are necessary to achieve optimal imaging resolution and contrast in this type of microscopy are discussed |
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| Beschreibung: | Date Completed 30.03.2015 Date Revised 25.10.2014 published: Print-Electronic Citation Status PubMed-not-MEDLINE |
| ISSN: | 1600-5775 |
| DOI: | 10.1107/S1600577514016555 |