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231224s2014 xx |||||o 00| ||eng c |
| 024 |
7 |
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|a 10.1002/adma.201400410
|2 doi
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5 |
2 |
|a pubmed24n0790.xml
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|a (DE-627)NLM236981714
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|a (NLM)24692235
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|a DE-627
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|c DE-627
|e rakwb
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|a eng
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| 100 |
1 |
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|a Eigenfeld, Nathan T
|e verfasserin
|4 aut
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| 245 |
1 |
0 |
|a Ultra-thin 3D nano-devices from atomic layer deposition on polyimide
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| 264 |
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1 |
|c 2014
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| 336 |
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|a Text
|b txt
|2 rdacontent
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| 337 |
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|a ƒaComputermedien
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|2 rdamedia
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| 338 |
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|a ƒa Online-Ressource
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|2 rdacarrier
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|a Date Completed 22.04.2015
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|a Date Revised 30.09.2020
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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4 |
|a Journal Article
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4 |
|a Research Support, U.S. Gov't, Non-P.H.S.
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| 650 |
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4 |
|a NEMS
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| 650 |
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4 |
|a atomic layer deposition
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| 650 |
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4 |
|a microbolometer
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| 650 |
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4 |
|a nanofabrication
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| 650 |
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4 |
|a polymers
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| 700 |
1 |
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|a Gray, Jason M
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Brown, Joseph J
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Skidmore, George D
|e verfasserin
|4 aut
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| 700 |
1 |
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|a George, Steven M
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Bright, Victor M
|e verfasserin
|4 aut
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| 773 |
0 |
8 |
|i Enthalten in
|t Advanced materials (Deerfield Beach, Fla.)
|d 1998
|g 26(2014), 23 vom: 18. Juni, Seite 3962-7
|w (DE-627)NLM098206397
|x 1521-4095
|7 nnns
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| 773 |
1 |
8 |
|g volume:26
|g year:2014
|g number:23
|g day:18
|g month:06
|g pages:3962-7
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| 856 |
4 |
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|u http://dx.doi.org/10.1002/adma.201400410
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|h 3962-7
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