Programmable mechanical resonances in MEMS by localized joule heating of phase change materials

© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 25(2013), 44 vom: 26. Nov., Seite 6430-5
1. Verfasser: Manca, Nicola (VerfasserIn)
Weitere Verfasser: Pellegrino, Luca, Kanki, Teruo, Yamasaki, Syouta, Tanaka, Hidekazu, Siri, Antonio Sergio, Marré, Daniele
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Joule heating adaptative electronics frequency tuning mechanical resonators vanadium dioxide
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520 |a A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays 
650 4 |a Journal Article 
650 4 |a Research Support, Non-U.S. Gov't 
650 4 |a Joule heating 
650 4 |a adaptative electronics 
650 4 |a frequency tuning 
650 4 |a mechanical resonators 
650 4 |a vanadium dioxide 
700 1 |a Pellegrino, Luca  |e verfasserin  |4 aut 
700 1 |a Kanki, Teruo  |e verfasserin  |4 aut 
700 1 |a Yamasaki, Syouta  |e verfasserin  |4 aut 
700 1 |a Tanaka, Hidekazu  |e verfasserin  |4 aut 
700 1 |a Siri, Antonio Sergio  |e verfasserin  |4 aut 
700 1 |a Marré, Daniele  |e verfasserin  |4 aut 
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