Programmable mechanical resonances in MEMS by localized joule heating of phase change materials

Programmable mechanical resonances in MEMS by localized joule heating of phase change materials

© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Bibliographische Detailangaben
Veröffentlicht in:Advanced materials (Deerfield Beach, Fla.). - 1998. - 25(2013), 44 vom: 26. Nov., Seite 6430-5
1. Verfasser: Manca, Nicola (VerfasserIn)
Weitere Verfasser: Pellegrino, Luca, Kanki, Teruo, Yamasaki, Syouta, Tanaka, Hidekazu, Siri, Antonio Sergio, Marré, Daniele
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2013
Zugriff auf das übergeordnete Werk:Advanced materials (Deerfield Beach, Fla.)
Schlagworte:Journal Article Research Support, Non-U.S. Gov't Joule heating adaptative electronics frequency tuning mechanical resonators vanadium dioxide
Beschreibung
Zusammenfassung:© 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays
Beschreibung:Date Completed 14.07.2014
Date Revised 01.10.2020
published: Print-Electronic
Citation Status PubMed-not-MEDLINE
ISSN:1521-4095
DOI:10.1002/adma.201302087