Effect of pore structure of nanometer scale porous films on the measured elastic modulus
The impact of pore structure of nanoporous films on the measured elastic modulus is demonstrated for silica-based nanoporous low-k films that are fabricated using an alternative manufacturing sequence which allows a separate control of porosity and matrix properties. For this purpose, different expe...
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Détails bibliographiques
| Publié dans: | Langmuir : the ACS journal of surfaces and colloids. - 1985. - 29(2013), 38 vom: 24. Sept., Seite 12025-35
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| Auteur principal: |
Vanstreels, Kris
(Auteur) |
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| Autres auteurs: |
Wu, Chen,
Gonzalez, Mario,
Schneider, Dieter,
Gidley, David,
Verdonck, Patrick,
Baklanov, Mikhail R |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2013
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| Accès à la collection: | Langmuir : the ACS journal of surfaces and colloids
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| Sujets: | Journal Article
Membranes, Artificial |
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