Impact of plasma pretreatment and pore size on the sealing of ultra-low-k dielectrics by self-assembled monolayers

von Sun, Yiting
Veröffentlicht in: Langmuir : the ACS journal of surfaces and colloids (2014)

Effect of pore structure of nanometer scale porous films on the measured elastic modulus

von Vanstreels, Kris
Veröffentlicht in: Langmuir : the ACS journal of surfaces and colloids (2013)

Atomic layer deposition of TiO2 on surface modified nanoporous low-k films

von Levrau, Elisabeth
Veröffentlicht in: Langmuir : the ACS journal of surfaces and colloids (2013)