Effect of pore structure of nanometer scale porous films on the measured elastic modulus
The impact of pore structure of nanoporous films on the measured elastic modulus is demonstrated for silica-based nanoporous low-k films that are fabricated using an alternative manufacturing sequence which allows a separate control of porosity and matrix properties. For this purpose, different expe...
Ausführliche Beschreibung
Bibliographische Detailangaben
| Veröffentlicht in: | Langmuir : the ACS journal of surfaces and colloids. - 1992. - 29(2013), 38 vom: 24. Sept., Seite 12025-35
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| 1. Verfasser: |
Vanstreels, Kris
(VerfasserIn) |
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| Weitere Verfasser: |
Wu, Chen,
Gonzalez, Mario,
Schneider, Dieter,
Gidley, David,
Verdonck, Patrick,
Baklanov, Mikhail R |
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| Format: | Online-Aufsatz
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| Sprache: | English |
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| Veröffentlicht: |
2013
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| Zugriff auf das übergeordnete Werk: | Langmuir : the ACS journal of surfaces and colloids
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| Schlagworte: | Journal Article
Membranes, Artificial |
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