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231223s2010 xx |||||o 00| ||eng c |
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|a 10.1109/TUFFC.2010.1620
|2 doi
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|a pubmed24n0667.xml
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|a eng
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|a Le Brizoual, Laurent
|e verfasserin
|4 aut
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|a AlN/ZnO/diamond waveguiding layer acoustic wave structure
|b theoretical and experimental results
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|c 2010
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
|b cr
|2 rdacarrier
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|a Date Completed 05.01.2011
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|a Date Revised 03.08.2010
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|a published: Print
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|a Citation Status PubMed-not-MEDLINE
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|a We present a theoretical calculation and experimental results for a waveguiding layer acoustic wave (WLAW). The experimental device is modeled by the finite element method (FEM) for the AlN/ZnO/diamond structure. It was found that the AlN thickness must be at least larger than 3lambda/2 to obtain negligible surface displacement. In the same way, the ZnO thickness for a fixed value of AlN thickness at 2lambda must be larger than lambda/4 to confine the acoustic wave. The electromechanical coupling of the wave presents an optimum around lambda/2 for the ZnO layer thickness. A first experimental AlN/ZnO/diamond device has been developed and shows the WLAW at 412 MHz
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|a Journal Article
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|a Elmazria, Omar
|e verfasserin
|4 aut
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|a Zhgoon, Sergei
|e verfasserin
|4 aut
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|a Soussou, Akram
|e verfasserin
|4 aut
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|a Sarry, Frederic
|e verfasserin
|4 aut
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| 700 |
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|a Djouadi, Mohammed Abdou
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 57(2010), 8 vom: 01. Aug., Seite 1818-24
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnns
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| 773 |
1 |
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|g volume:57
|g year:2010
|g number:8
|g day:01
|g month:08
|g pages:1818-24
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|u http://dx.doi.org/10.1109/TUFFC.2010.1620
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