AlN/ZnO/diamond waveguiding layer acoustic wave structure : theoretical and experimental results

We present a theoretical calculation and experimental results for a waveguiding layer acoustic wave (WLAW). The experimental device is modeled by the finite element method (FEM) for the AlN/ZnO/diamond structure. It was found that the AlN thickness must be at least larger than 3lambda/2 to obtain ne...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 8 vom: 01. Aug., Seite 1818-24
1. Verfasser: Le Brizoual, Laurent (VerfasserIn)
Weitere Verfasser: Elmazria, Omar, Zhgoon, Sergei, Soussou, Akram, Sarry, Frederic, Djouadi, Mohammed Abdou
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2010
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Journal Article