AlN/ZnO/diamond waveguiding layer acoustic wave structure theoretical and experimental results

von Le Brizoual, Laurent
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2010)

Sezawa mode SAW pressure sensors based on ZnO/Si structure

von Talbi, Abdelkrim
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2004)