Temperature-compensated aluminum nitride lamb wave resonators
In this paper, the temperature compensation of AlN Lamb wave resonators using edge-type reflectors is theoretically studied and experimentally demonstrated. By adding a compensating layer of SiO2 with an appropriate thickness, a Lamb wave resonator based on a stack of AlN and SiO2 layers can achieve...
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Détails bibliographiques
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 57(2010), 3 vom: 01. März, Seite 524-32
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| Auteur principal: |
Lin, Chih-Ming
(Auteur) |
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| Autres auteurs: |
Yen, Ting-Ta,
Lai, Yun-Ju,
Felmetsger, Valery V,
Hopcroft, Matthew A,
Kuypers, Jan H,
Pisano, Albert P |
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| Format: | Article en ligne
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| Langue: | English |
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| Publié: |
2010
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control
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| Sujets: | Journal Article |
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