Suitability of surface acoustic wave oscillators fabricated using low temperature-grown AlN films on GaN/sapphire as UV sensors

Epitaxial AlN films were prepared on GaN/sapphire using a helicon sputtering system at the low temperature of 300 degrees C. Surface acoustic wave (SAW) devices fabricated on AlN/GaN/sapphire exhibited superior characteristics compared with those made on GaN/sapphire. An oscillator using an AlN/GaN/...

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Veröffentlicht in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 55(2008), 2 vom: 01. Feb., Seite 489-93
1. Verfasser: Chen, Tzu Chieh (VerfasserIn)
Weitere Verfasser: Lin, Yueh Ting, Lin, Chung Yi, Chen, W C, Chen, Meei Ru, Kao, Hui-Ling, Chyi, J I, Hsu, C H
Format: Online-Aufsatz
Sprache:English
Veröffentlicht: 2008
Zugriff auf das übergeordnete Werk:IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:Letter
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520 |a Epitaxial AlN films were prepared on GaN/sapphire using a helicon sputtering system at the low temperature of 300 degrees C. Surface acoustic wave (SAW) devices fabricated on AlN/GaN/sapphire exhibited superior characteristics compared with those made on GaN/sapphire. An oscillator using an AlN/GaN/sapphirebased SAW device is presented. The oscillation frequency decreased when the device was illuminated by ultraviolet (UV) radiation, and the downshift of the oscillation frequency increased with the illuminating UV power density. The results showed that the AlN/GaN/sapphire-layered structure SAW oscillators are suitable for visible blind UV detection and opened up the feasibility of developing remote UV sensors for different ranges of wavelengths on the III-nitrides 
650 4 |a Letter 
700 1 |a Lin, Yueh Ting  |e verfasserin  |4 aut 
700 1 |a Lin, Chung Yi  |e verfasserin  |4 aut 
700 1 |a Chen, W C  |e verfasserin  |4 aut 
700 1 |a Chen, Meei Ru  |e verfasserin  |4 aut 
700 1 |a Kao, Hui-Ling  |e verfasserin  |4 aut 
700 1 |a Chyi, J I  |e verfasserin  |4 aut 
700 1 |a Hsu, C H  |e verfasserin  |4 aut 
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