Deep-UV sensors based on SAW oscillators using low-temperature-grown AlN films on sapphires

von Laksana, Chipta
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2011)

Suitability of surface acoustic wave oscillators fabricated using low temperature-grown AlN films on GaN/sapphire as UV sensors

von Chen, Tzu Chieh
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2008)

Investigation of layered structure SAW devices fabricated using low temperature grown AlN thin film on GaN/sapphire

von Lin, Hui-Feng
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2005)