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231223s2008 xx |||||o 00| ||eng c |
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|a 10.1107/S0909049507063510
|2 doi
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|a pubmed24n0593.xml
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|a (DE-627)NLM177828684
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|a (NLM)18296784
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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1 |
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|a Chen, Y T
|e verfasserin
|4 aut
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|a Fabrication of high-aspect-ratio Fresnel zone plates by e-beam lithography and electroplating
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|c 2008
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|a Text
|b txt
|2 rdacontent
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|a ƒaComputermedien
|b c
|2 rdamedia
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|a ƒa Online-Ressource
|b cr
|2 rdacarrier
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|a Date Completed 19.05.2008
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|a Date Revised 25.02.2008
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|a published: Print-Electronic
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|a Citation Status PubMed-not-MEDLINE
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|a The fabrication of gold Fresnel zone plates, by a combination of e-beam lithography and electrodeposition, with a 30 nm outermost zone width and a 450 nm-thick structure is described. The e-beam lithography process was implemented with a careful evaluation of applied dosage, tests of different bake-out temperatures and durations for the photoresist, and the use of a developer without methylisobutylketone. Electrodeposition with a pulsed current mode and with a specially designed apparatus produced the desired high-aspect-ratio nanostructures. The fabricated zone plates were examined by electron microscopy and their performances were assessed using a transmission X-ray microscope. The results specifically demonstrated an image resolution of 40 nm
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|a Journal Article
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|a Lo, T N
|e verfasserin
|4 aut
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|a Chiu, C W
|e verfasserin
|4 aut
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|a Wang, J Y
|e verfasserin
|4 aut
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1 |
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|a Wang, C L
|e verfasserin
|4 aut
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1 |
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|a Liu, C J
|e verfasserin
|4 aut
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1 |
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|a Wu, S R
|e verfasserin
|4 aut
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|a Jeng, S T
|e verfasserin
|4 aut
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1 |
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|a Yang, C C
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Shiue, J
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Chen, C H
|e verfasserin
|4 aut
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| 700 |
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|a Hwu, Y
|e verfasserin
|4 aut
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1 |
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|a Yin, G C
|e verfasserin
|4 aut
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| 700 |
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|a Lin, H M
|e verfasserin
|4 aut
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|a Je, J H
|e verfasserin
|4 aut
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| 700 |
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|a Margaritondo, G
|e verfasserin
|4 aut
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| 773 |
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|i Enthalten in
|t Journal of synchrotron radiation
|d 1994
|g 15(2008), Pt 2 vom: 07. März, Seite 170-5
|w (DE-627)NLM09824129X
|x 1600-5775
|7 nnns
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| 773 |
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|g volume:15
|g year:2008
|g number:Pt 2
|g day:07
|g month:03
|g pages:170-5
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|u http://dx.doi.org/10.1107/S0909049507063510
|3 Volltext
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|d 15
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|h 170-5
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