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231223s2006 xx ||||| 00| ||eng c |
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|a (DE-627)NLM167359401
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|a (NLM)17186931
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|a DE-627
|b ger
|c DE-627
|e rakwb
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|a eng
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1 |
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|a Kaajakari, Ville
|e verfasserin
|4 aut
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|a Electrostatic transducers for micromechanical resonators
|b free space and solid dielectric
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|c 2006
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|a Text
|b txt
|2 rdacontent
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|a ohne Hilfsmittel zu benutzen
|b n
|2 rdamedia
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| 338 |
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|a Band
|b nc
|2 rdacarrier
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| 500 |
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|a Date Completed 30.01.2007
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|a Date Revised 10.12.2019
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|a published: Print
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|a CommentIn: IEEE Trans Ultrason Ferroelectr Freq Control. 2007 Dec;54(12):2696-8. - PMID 18276576
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|a Citation Status MEDLINE
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|a Three electrostatic transduction methods are analyzed for a micromechanical, longitudinal mode, beam resonator. The conventional parallel plate transducer placed at the location of maximum displacement is compared to two solid, dielectric transducers internal to the resonator. Although the solid dielectric offers higher permittivity than the free-space-filled transducers, the unfavorable locations of the internal transducers reduce or even remove the performance advantage of the higher permittivity
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|a Evaluation Study
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|a Letter
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|a Alastalo, Ari T
|e verfasserin
|4 aut
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|a Mattila, Tomi
|e verfasserin
|4 aut
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|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 53(2006), 12 vom: 11. Dez., Seite 2484-9
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnns
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| 773 |
1 |
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|g volume:53
|g year:2006
|g number:12
|g day:11
|g month:12
|g pages:2484-9
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|a AR
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| 952 |
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|d 53
|j 2006
|e 12
|b 11
|c 12
|h 2484-9
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