Electrostatic transducers for micromechanical resonators : free space and solid dielectric
Three electrostatic transduction methods are analyzed for a micromechanical, longitudinal mode, beam resonator. The conventional parallel plate transducer placed at the location of maximum displacement is compared to two solid, dielectric transducers internal to the resonator. Although the solid die...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 53(2006), 12 vom: 11. Dez., Seite 2484-9 |
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| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2006
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Evaluation Study Letter |