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231223s2004 xx ||||| 00| ||eng c |
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|a pubmed25n0509.xml
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|a (NLM)15600092
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|a DE-627
|b ger
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|e rakwb
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|a eng
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| 100 |
1 |
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|a Jing, Yang
|e verfasserin
|4 aut
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| 245 |
1 |
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|a Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives
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| 264 |
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1 |
|c 2004
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| 336 |
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|a Text
|b txt
|2 rdacontent
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| 337 |
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|a ohne Hilfsmittel zu benutzen
|b n
|2 rdamedia
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| 338 |
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|a Band
|b nc
|2 rdacarrier
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| 500 |
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|a Date Completed 07.02.2005
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|a Date Revised 17.09.2019
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|a published: Print
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|a Citation Status PubMed-not-MEDLINE
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|a A new U-type micro-actuator for precisely positioning a magnetic head in high-density hard disk drives was proposed and developed. The micro-actuator is composed of a U-type stainless steel substrate and two piezoelectric ceramic elements. Using a high-d31 piezoelectric coefficient PMN-PZT ceramic plate and adopting reactive ion etching process fabricate the piezoelectric elements. Reliability against temperature was investigated to ensure the practical application to the drive products. The U-type substrate attached to each side via piezoelectric elements also was simulated by the finite-element method and practically measured by a laser Doppler vibrometer in order to testify the driving mechanics of it. The micro-actuator coupled with two piezoelectric elements featured large displacement of 0.875 microm and high-resonance frequency over 22 kHz. The novel piezoelectric micro-actuators then possess a useful compromise performance to displacement, resonance frequency, and generative force. The results reveal that the new design concept provides a valuable alternative for multilayer piezoelectric micro-actuators
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| 650 |
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|a Journal Article
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| 700 |
1 |
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|a Luo, Jianbin
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Yang, Wenyan
|e verfasserin
|4 aut
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| 700 |
1 |
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|a Ju, Guoxian
|e verfasserin
|4 aut
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| 773 |
0 |
8 |
|i Enthalten in
|t IEEE transactions on ultrasonics, ferroelectrics, and frequency control
|d 1986
|g 51(2004), 11 vom: 11. Nov., Seite 1470-6
|w (DE-627)NLM098181017
|x 1525-8955
|7 nnas
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| 773 |
1 |
8 |
|g volume:51
|g year:2004
|g number:11
|g day:11
|g month:11
|g pages:1470-6
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|a GBV_ILN_24
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| 912 |
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|a GBV_ILN_350
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| 951 |
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|a AR
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| 952 |
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|d 51
|j 2004
|e 11
|b 11
|c 11
|h 1470-6
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