Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives
A new U-type micro-actuator for precisely positioning a magnetic head in high-density hard disk drives was proposed and developed. The micro-actuator is composed of a U-type stainless steel substrate and two piezoelectric ceramic elements. Using a high-d31 piezoelectric coefficient PMN-PZT ceramic p...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 51(2004), 11 vom: 11. Nov., Seite 1470-6 |
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| Format: | Aufsatz |
| Sprache: | English |
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2004
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |