Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives
A new U-type micro-actuator for precisely positioning a magnetic head in high-density hard disk drives was proposed and developed. The micro-actuator is composed of a U-type stainless steel substrate and two piezoelectric ceramic elements. Using a high-d31 piezoelectric coefficient PMN-PZT ceramic p...
| Publié dans: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1986. - 51(2004), 11 vom: 11. Nov., Seite 1470-6 |
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| Auteur principal: | |
| Autres auteurs: | , , |
| Format: | Article |
| Langue: | English |
| Publié: |
2004
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| Accès à la collection: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Sujets: | Journal Article |