Sezawa mode SAW pressure sensors based on ZnO/Si structure
Surface acoustic wave (SAW) devices have been shown to be suitable for many sensor applications. One of these applications is pressure sensor. In this study we investigate the performance of SAW pressure sensors formed with ZnO/Si(001) structure. The pressure sensitivities of Rayleigh mode as well a...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 51(2004), 11 vom: 11. Nov., Seite 1421-6 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2004
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Journal Article |