Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry
In this letter, a 1.8-mm x 1.8-mm capacitive micromachined ultrasonic transducer (CMUT) element is experimentally characterized by means of optical measurements. Optical displacement measurements provide information on the resonant behavior of the single membranes and also allow us to investigate th...
| Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 49(2002), 3 vom: 01. März, Seite 289-92 |
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| 1. Verfasser: | |
| Weitere Verfasser: | , , , , , , |
| Format: | Aufsatz |
| Sprache: | English |
| Veröffentlicht: |
2002
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| Zugriff auf das übergeordnete Werk: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control |
| Schlagworte: | Letter Coated Materials, Biocompatible Membranes, Artificial Oxides Resins, Synthetic Silicon Compounds silicon monoxide 1OQN9CBG7L polyimide resin 39355-34-5 |
| Zusammenfassung: | In this letter, a 1.8-mm x 1.8-mm capacitive micromachined ultrasonic transducer (CMUT) element is experimentally characterized by means of optical measurements. Optical displacement measurements provide information on the resonant behavior of the single membranes and also allow us to investigate the dispersion in the frequency spectrum of adjacent membranes. In addition, higher order mode shapes are observed, showing that either symmetrical or asymmetrical modes are excited in CMUT membranes. Laser interferometry vibration maps, combined with quantitative displacement measurements, provide information about the quality and repeatability of the fabrication process, which is a basic requirement for 2-D array fabrication for ultrasound imaging |
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| Beschreibung: | Date Completed 06.11.2002 Date Revised 16.09.2019 published: Print Citation Status MEDLINE |
| ISSN: | 0885-3010 |