Design, fabrication and characterization of a capacitive micromachined ultrasonic probe for medical imaging

von Caliano, Giosué
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2005)

Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry

von Caronti, Alessandro
Veröffentlicht in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control (2002)