Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry

In this letter, a 1.8-mm x 1.8-mm capacitive micromachined ultrasonic transducer (CMUT) element is experimentally characterized by means of optical measurements. Optical displacement measurements provide information on the resonant behavior of the single membranes and also allow us to investigate th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control. - 1999. - 49(2002), 3 vom: 01. März, Seite 289-92
1. Verfasser:	Caronti, Alessandro (VerfasserIn)
Weitere Verfasser:	Majjad, Hicham, Ballandras, Sylvain, Caliano, Giosue, Carotenuto, Riccardo, Iula, Antonio, Foglietti, Vittorio, Pappalardo, Massimo
Format:	Aufsatz
Sprache:	English
Veröffentlicht:	2002
Zugriff auf das übergeordnete Werk:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Schlagworte:	Letter Coated Materials, Biocompatible Membranes, Artificial Oxides Resins, Synthetic Silicon Compounds silicon monoxide 1OQN9CBG7L polyimide resin 39355-34-5